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Part Name(s) : SM6250-DDN-T-050-000
Silicon Microstructures, Inc.
Silicon Microstructures, Inc.
Description : Ultra-Low Pressure Analog Sensor

DESCRIPTION
The Silicon Microstructures SM6250 Series of MEMS Pressure Sensors combines state-of-the-art Pressure Sensor technology with CMOS mixed-signal processing technology in a dual ported SOIC-16 package.
Combining the Pressure Sensor with a signal conditioning ASIC in a single package simplifies the use of advanced silicon micromachined Pressure Sensors. The Pressure Sensor can be mounted directly to a standard printed circuit board (PCB). Pressure is measured from the backside, while additional protection to the electronic circuitry is provided by protective gel on the topside. The SM6250 is shipped uncalibrated and uncompensated with only a functional test.

FEATURES
• -50 to +50 mbar
• 10x burst Pressure
• Amplified Analog output
• 2.7 V to 5.5 V operation
• SOIC-16 Package
• -40oC to 85oC operating temperature range

Part Name(s) : SM1216-HGC-S-060-001
Silicon Microstructures, Inc.
Silicon Microstructures, Inc.
Description : Medium Pressure Analog Sensor

DESCRIPTION
The SM1216 is a Analog, medium Pressure MEMS Sensor, with an optional Analog output, offering state-of-the-art Pressure transducer technology and CMOS mixed signal processing technology to produce a Analog, fully conditioned, Pressure and temperature compensated Sensor in JEDEC standard SOIC-10 package with vertical port. It is a gauge Pressure Sensor.

FEATURES
Pressure range of -60 to 0kPa (-8.7 to 0PSI) gauge output
• Accuracy: ±1.5% full scale
Pressure calibrated and temperature compensated output
Analog and I2C Digital Interface
• Compensated temperature range: -5 to +65°C
• Insensitive to mounting orientation
• Robust JEDEC SOIC-10 package for automated assembly
• Manufactured according to ISO9001 and ISO/TS 16949 standards

Silicon Microstructures, Inc.
Silicon Microstructures, Inc.
Description : Medium Pressure Digital Sensor

DESCRIPTION
The SM1291 is a digital, medium Pressure MEMS Sensor, with an optional Analog output, offering state-of-the-art Pressure transducer technology and CMOS mixed signal processing technology to produce a digital or Analog, fully conditioned, Pressure and temperature compensated Sensor in JEDEC standard SOIC-10 package with vertical port. It is a gauge Pressure Sensor.

FEATURES
Pressure range of 0 to 30 PSI gauge output
• 16-bit digital, Pressure calibrated and temperature compensated
   output
• I2C Digital and Analog Interface
• Digital accuracy: ±1% full scale (1.5% Analog accuracy)
• Compensated temperature range: -20 to +85°C
• Insensitive to mounting orientation
• Robust JEDEC SOIC-10 package for automated assembly
• Manufactured according to ISO9001 and ISO/TS 16949 standards

Silicon Microstructures, Inc.
Silicon Microstructures, Inc.
Description : Medium Pressure Digital Sensor

DESCRIPTION
The SM1291 is a digital, medium Pressure MEMS Sensor, with an optional Analog output, offering state-of-the-art Pressure transducer technology and CMOS mixed signal processing technology to produce a digital or Analog, fully conditioned, Pressure and temperature compensated Sensor in JEDEC standard SOIC-10 package with vertical port. It is a gauge Pressure Sensor.

FEATURES
Pressure range of 0 to 200 kPa gauge output
• 16-bit digital, Pressure calibrated and temperature compensated
   output
• I2C Digital and Analog Interface
• Digital accuracy: ±1% full scale (1.5% Analog accuracy)
• Compensated temperature range: 0 to +85°C
• Insensitive to mounting orientation
• Robust JEDEC SOIC-10 package for automated assembly
• Manufactured according to ISO9001 and ISO/TS 16949 standards

Silicon Microstructures, Inc.
Silicon Microstructures, Inc.
Description : Medium Pressure Digital Sensor

DESCRIPTION
The SM1291 is a digital, medium Pressure MEMS Sensor, with an optional Analog output, offering state-of-the-art Pressure transducer technology and CMOS mixed signal processing technology to produce a digital or Analog, fully conditioned, Pressure and temperature compensated Sensor in JEDEC standard SOIC-10 package with vertical port. It is a gauge Pressure Sensor.

FEATURES
Pressure range of 0 to 15 PSI gauge output
• 16-bit digital, Pressure calibrated and temperature compensated
   output
• I2C Digital and Analog Interface
• Digital accuracy: ±1% full scale (1.5% Analog accuracy)
• Compensated temperature range: -20 to +85°C
• Insensitive to mounting orientation
• Robust JEDEC SOIC-10 package for automated assembly
• Manufactured according to ISO9001 and ISO/TS 16949 standards

Silicon Microstructures, Inc.
Silicon Microstructures, Inc.
Description : Low Pressure Digital Sensor

DESCRIPTION
The SM4291 is a digital, low Pressure MEMS Sensor, with an optional Analog output, offering state-of-the-art Pressure transducer technology and CMOS mixed signal processing technology to produce a digital or Analog, fully conditioned, Pressure and temperature compensated Sensor in JEDEC standard SOIC-10 package with vertical port. It is a gauge Pressure Sensor.

FEATURES
Pressure range of 0 to 300 mm Hg (0-5.8 PSI) gauge output
• Digital Output Accuracy: ±1% full scale
• 16-bit digital, Pressure calibrated and temperature compensated
   output
• I2C Digital and Analog Interface
• Compensated temperature range: -5 to +65 °C
• Insensitive to mounting orientation
• Robust JEDEC SOIC-10 package for automated assembly
• Manufactured according to ISO9001 and ISO/TS 16949 standards

Silicon Microstructures, Inc.
Silicon Microstructures, Inc.
Description : Barometric Air Pressure (BAP) Sensor

DESCRIPTION
The SM1111-EEN-S-115-001 is an absolute Pressure Sensor for barometric air Pressure measurement (BAP). It includes a piezoresistive Pressure Sensor die and a signal processing IC, which performs amplification and thermal compensation of the Pressure Sensor output to provide a linear, thermally stable signal output.
The Sensor delivers calibrated output data at a ratiometric Analog voltage output. The Pressure range 15 to 115 kPa is mapped linearly to the nominal output range VAOUT,1 to VAOUT,2. Sensor specific calibration data, configuration and product ID are stored in an embedded NVM.

FEATURES
• Fully integrated and compensated Pressure Sensor
• Measurement of absolute Pressure: 15 - 115 kPa
• Full thermal compensation to accuracy ±1.0 %FS
• Ratiometric Analog output with wide linear range
• Two 16-bit ADCs for acquisition of Pressure and temperature
   inputs; Pressure acquired at 20 kS/s
• High Resolution Digital to Analog converter (DAC)
• Diagnosis of Sensor, Sensor supply wiring, and NVM check-sum
   supervision at power-on
• Supply voltage 5.0 V +/- 0.5V
• Large operating temperature range -40 to + 85°C
• Automotive qualified acc. to AEC-Q100

Silicon Microstructures, Inc.
Silicon Microstructures, Inc.
Description : Barometric Air Pressure (BAP) Sensor

DESCRIPTION
The SM1111-EEN-S-115-000 is an absolute Pressure Sensor for barometric air Pressure measurement (BAP). It includes a piezoresistive Pressure Sensor die and a signal processing IC, which performs amplification and thermal compensation of the Pressure Sensor output to provide a linear, thermally stable signal output.
The Sensor delivers calibrated output data at a ratiometric Analog voltage output. The Pressure range 15 to 115 kPa is mapped linearly to the nominal output range VAOUT,1 to VAOUT,2. Sensor specific calibration data, configuration and product ID are stored in an embedded NVM.

FEATURES
• Fully integrated and compensated Pressure Sensor
• Measurement of absolute Pressure: 15 - 115 kPa
• Full thermal compensation to accuracy ±1.0 %FS
• Ratiometric Analog output with wide linear range
• Two 16-bit ADCs for acquisition of Pressure and temperature
   inputs; Pressure acquired at 20 kS/s
• High Resolution Digital to Analog converter (DAC)
• Diagnosis of Sensor, Sensor supply wiring, and NVM check-sum
   supervision at power-on
• Supply voltage 5.0 V +/- 0.5V
• Large operating temperature range -40 to + 85°C
• Automotive qualified acc. to AEC-Q100

Silicon Microstructures, Inc.
Silicon Microstructures, Inc.
Description : Barometric Air Pressure (BAP) Sensor

DESCRIPTION
The SM1111-EEN-S-165-000 is an absolute Pressure Sensor for barometric air Pressure measurement (BAP). It includes a piezoresistive Pressure Sensor die and a signal processing IC, which performs amplification and thermal compensation of the Pressure Sensor output to provide a linear, thermally stable signal output.
The Sensor delivers calibrated output data at a ratiometric Analog voltage output. The Pressure range 60 to 165 kPa is mapped linearly to the nominal output range VAOUT,1 to VAOUT,2. Sensor specific calibration data, configuration and product ID are stored in an embedded NVM.

FEATURES
• Fully integrated and compensated Pressure Sensor
• Measurement of absolute Pressure: 60 - 165 kPa
• Full thermal compensation to accuracy ±1.0 %FS
• Ratiometric Analog output with wide linear range
• Two 16-bit ADCs for acquisition of Pressure and temperature
   inputs; Pressure acquired at 20 kS/s
• High Resolution Digital to Analog converter (DAC)
• Diagnosis of Sensor, Sensor supply wiring, and NVM check-sum
   supervision at power-on
• Supply voltage 5.0 V +/- 0.5V
• Large operating temperature range -40 to + 85°C
• Automotive qualified acc. to AEC-Q100

Silicon Microstructures, Inc.
Silicon Microstructures, Inc.
Description : Medium Pressure Digital Sensor

DESCRIPTION
The SM1493 is a digital, medium Pressure MEMS Sensor, with an optional Analog output, offering state-of-the-art Pressure transducer technology and CMOS mixed signal processing technology to produce a digital or Analog, fully conditioned, Pressure and temperature compensated Sensor in JEDEC standard SOIC-10 package with vertical port. It is a asymmetric differential Pressure Sensor.

FEATURES
Pressure range of -90 to 50 kPa asymmetric differential output
• 16-bit digital, Pressure calibrated and temperature compensated
   output
• I2C Digital and Analog Interface
• Accuracy: ±3% full scale
• Compensated temperature range: 0 to +95°C
• Insensitive to mounting orientation
• Robust JEDEC SOIC-10 package for automated assembly
• Manufactured according to ISO9001 and ISO/TS 16949 standards

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