ML9042 View Datasheet(PDF) - LAPIS Semiconductor Co., Ltd.
Part Name
Description
MFG CO.
'ML9042' PDF : 58 Pages View PDF
LAPIS Semiconductor
FEDL9042-01
ML9042-xx
ML9042-xx CVWA/DVWA ALIGNMENT MARK SPECIFICATION
Alignment Mark Coordinates
Y
A
....................................................................................................
:
:
(0, 0)
....................................................................................................
B
:
:
X
C
Alignment Mark
X (m)
Y (m)
A
–3770
770
B
3770
770
C
3770
–770
The coordinates (X, Y) indicate the distances to the center of an alignment mark (the center of the maximum
outline of the L shape).
Alignment Mark Layer
Gold bump
Alignment Mark Gold Bump Specification
Symbol
a
b
Parameter
Alignment Mark Width
Alignment Mark Size
Mark
A, B, C
A, B, C
Size (m)
30
80
b
a
+
b
a
54/58
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